International Science Community Association Research Journal of Recent Sciences 2277 - 2502 4 7 2015 July 2 An Analysis of TiAlCrSiCN Nanoparticles coating via PVD on Cold Work Tool Steel 18 25 EN Mirtalebipour SayedeZaynab 1 Department of Psychology,Tonekabon Branch, Islamic Azad University, Tonekabon, IRAN Tayebeh Ferdowsi 2 University of Tehran, Tehran, IRAN Pouretemad Hamidreza 3 Shahid Beheshti University, Tehran, IRAN MaryamSadeghi Afrakati 4 Pourhamzeh Mohsen 1 Iran University of Science and Technology, Tehran, IRAN Babaei Bahman 2 Mohsen Faizi 3 Azimi SeyyedAli 1 Islamic Azad University of Central Tehran Branch, Tehran, IRAN Mir-Khalili SeyyedMahmoud 2 Department of Law, Farabi college, University of Tehran, IRAN Majid Karimian 1 Department of Mechanical Engineering, Khomeinishahr branch, Islamic Azad University-Khomeinishahr- Isfahan, IRAN Yaghoubi Yaghoub 2 Department of Material Engineering University of Tarbiat Modares, Tehran, IRAN Eftekhari Mohsen 3 > Research Paper 2014 1 4 2015 July 2 The present paper has applied energy-dispersive X-ray (EDX), X-ray diffraction (XRD), field emission scanning electron microscope (FESEM), and atomic electron microscope (AFM) to characterize coating in terms of chemical compound, structure, morphology of surface and cross section, respectively. Nanoidentation, microhardness and pin on disk test have also been used to analyze mechanical characteristics of coating. The findings reveal that using target with chemical compound containing Silicon leads to entering silicon into the structure of coating. Comparing with the results of XRD, it is revealed that adding Silicon to TiAlCrCN coating structure causes TiAlCrCN/a-SiCN nanocomposite structure. The size of crystals existing in coating is in nano scale (about 9/5 nm for TiAlCrSiCN). The data obtained from FESEM and AFM show that during layer growth, some particles with low adherence are formed in the above level atmosphere of coating and are separated from coating surface as preceding the process leading to forming some holes. Further, adding Silicon to coating structure decreases roughness as well as RMS of coating from 9/7 to 4/6. Friction coefficient of coating is decreased by adding Silicon and the degree of hardness is also increased from 27/5 to 38/5 GPa indicating the increase of mechanical characteristics and friction resistance of coating. Copyright@ International Science Community Association